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Stanford Nanofabrication Facility
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Processing Techniques
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Microscopy
Keyence Digital Microscope VHX-6000
keyence
Microscopy
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SNF Exfab Paul G Allen 104 Stinson
Microscopy
SEM -Zeiss Merlin
sem-merlin
Mid-Range SEM for inspection of wafer defects, etch depths, and lithography overlay.
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SNF Exfab Paul G Allen 104 Stinson
Detail Tab
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Processing Technique
Equipment name & NEMO ID
Cleanliness
Material Thickness Range
Substrate Size
Microscopy
Keyence Digital Microscope VHX-6000
keyence
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Pieces
2"
3"
4"
6"
Microscopy
SEM -Zeiss Merlin
sem-merlin
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0.00 mm
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35.00 mm
Pieces
2"
3"
4"
6"
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