Following is a list of tools located in this lab space (room).
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
AJA Evaporator aja-evap |
Evaporator AJA training | Flexible | SNF Exfab Paul G Allen 155A Venice |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance |
|
Epilog Fusion M2 Laser Cutter lasercutter |
Lasercutter Epilog Fusion M2 Training | Flexible | SNF Exfab Paul G Allen 155A Venice | |
|
Lesker Sputter lesker-sputter |
Sputter Lesker 1&2 Training | Flexible | SNF Exfab Paul G Allen 155A Venice |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter |
|
Minitech-GX Micromill micromill |
Micromill Training | Flexible | SNF Exfab Paul G Allen 155A Venice | |
|
Optomec Printer optomec-printer |
Flexible | SNF Exfab Paul G Allen 155A Venice | ||
|
Plasmaetch PE-50 plasma-etch |
Plasmaetch PE-50 Training | Flexible | SNF Exfab Paul G Allen 155A Venice |
Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment. |