Sheet Resistance Measurement

Sheet resistance is a common electrical property used to characterize thin films of conducting and semiconducting materials. It is a measure of the lateral resistance through a thin square of material, and it is independent of the size of the square.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Sheet Resistance Measurement, Hall measurement	Lakeshore Hall Measurement System LakeshoreHall	Contactless sheet resistance mapping system for up to 8" wafer, based on eddy current	All	SNF Exfab Paul G Allen 151 Ocean
Sheet Resistance Measurement	LEI1500 Contactless Sheet Resistance Mapping eddycurrent	Contactless sheet resistance mapping system for up to 8" wafer, based on eddy current	All	SNF Exfab Paul G Allen 151 Ocean
Sheet Resistance Measurement	Prometrix Resistivity Mapping System prometrix	Contact sheet resistance mapping system for 2"up to 8" wafers.	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Material Thickness Range	Substrate Size	Maximum Load (number of wafers)	Process Temperature Range	Notes
Sheet Resistance Measurement, Hall measurement	Lakeshore Hall Measurement System LakeshoreHall	All	100.00 μm - 1000.00 μm	Pieces	1 piece	-258 °C - 1000 °C
Sheet Resistance Measurement	LEI1500 Contactless Sheet Resistance Mapping eddycurrent	All		2" 3" 4" 6" 8"	1 wafer(2" to 8")
Sheet Resistance Measurement	Prometrix Resistivity Mapping System prometrix	All		2" 3" 4" 6" 8"	1		3 Probe Heads for different cleanliness groups.