Project Type: 
E241
Date: 
March 2020 (all day)
Areas of Interest: 
Low temperature ALD
Report: 
F19- SOP for Low-Temperature ALD of Alumina and Film Quality Characterization
W20- Characterization of Alumina and Hafnia grown by low-temperature ALD Final Report
Processing Technique (former Function and Method): 
Thermal ALD
Researchers and (Mentors): 
Molly Anderson, Ilan Rosen (Michelle Rincon), (J Provine), (Vijay Narasimhan)
List of Important Equipment: 
Savannah ALD (savannah)
Nano Nugget: 
Presentation: 
Low temperature ALD-Grown Superconducting Tunnel Contacts- Fall 2019 Final Presentation