Vertical Semiconductor Blades
Project Type:
E241
Date:
June 2015
Areas of Interest:
MOCVD, ASML, double exposure, JEOL, InSb, Ox III-V
Report(s):
Processing Technique (former Function and Method):
Researchers and (Mentors):
Martin Winterkorn, Anup Dadlani, Karen Kim, (J Provine)
List of Important Equipment:
Presentation(s):
