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Preparation of ultra-smooth platinum films
Project Type:
E241
Date:
December 2017
Areas of Interest:
Ultra-smooth metal films
Report(s):
Ultra-smooth platinum films for biosensing applications- Final Report
Processing Technique (former Function and Method):
Deposition
Wafer Polishing
Researchers and (Mentors):
Charmaine Chia, (Michelle Rincon)
List of Important Equipment:
Heidelberg MLA 150 (heidelberg)
CMP GnP POLI-400L (cmp)
AJA Evaporator (aja-evap)
Lesker Sputter (lesker-sputter)
Presentation(s):
Preparation of Ultra-Smooth Platinum Films- Final Presentation