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Equipment
Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Exfab YES2 HMDS oven training
Lab Facility:
SNF Exfab
Training Charges:
0.00 hours
Primary Trainer:
Swaroop Kommera
Backup Trainer(s):
Michael Robles
Cliff Knollenberg
Uli Thumser
Primary Maintenance:
Gary Sosa
Backup Maintenance:
Mario Vilanova
Steps to become a tool user
Become a
member of SNF
.
"All Litho" class is required before training on any of the lithography tools. Please send an email to
all-litho-training@lists.stanford.edu
to sign up for the All Litho class. Read more here:
All Litho class
.
Contact the primary trainer:
Swaroop Kommera
Equipment Covered by this Training
HMDS Vapor Prime Oven, YES2 (yes2)