Stepper

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Stepper	ASML PAS 5500/60 i-line Stepper asml	ASML PAS 5500/60 i-line stepper, automatic for 25 inch wafers, 450nm resolution, 365nm near-UV light	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Minimum Resolution	Exposure Wavelength	Substrate Size	Mask Size	Notes
Stepper	ASML PAS 5500/60 i-line Stepper asml	All	0.45 μm	365 nm	4"	5 inch	5:1 reducing stepper