Annealing (furnace)

Furnaces annealing is a heated process performed in an Annealing Furnace to can change material properties of a sample. Anneal parameters include temperature, ramp time, anneal time, ambient gas. Generally anneal times range from 15 minutes to many hours.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Oxide Growth (furnace), Annealing (furnace)	Tystar Bank 1 Tube 2 B1T2 Flexible Oxide		Flexible	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Materials Lab Supplied	Material Thickness Range	Substrate Size	Maximum Load (number of wafers)	Process Temperature Range	Gases
Oxide Growth (furnace), Annealing (furnace)	Tystar Bank 1 Tube 2 B1T2 Flexible Oxide	Flexible	SiO₂	25.00 Å - 2.00 μm	4" 6"	100	400 °C - 1100 °C	4% H₂ in N₂ N₂ O₂

Techniques

Annealing (furnace)

Technique Tabs