Chemical Formula:
SiGe
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
Xactix Xenon Difluoride Etcher xactix |
Xactix Xenon Difluoride Etcher Training | "All" | SNF Paul G Allen L107 Cleanroom |
Isotropic Si etching; can be used for backside Si removal on small pieces |