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Tystar Bank 2 Tube 5 (B2T5 Clean Oxide Anneal)


Tystar 4600 Mini Bank 1Tube 2 is an atmospheric pressure furnace and offer processes such as:

  • Pyrogenic Oxidation Wet Oxidation
  • Atmospheric Dry Oxidation
  • TLC Dry Oxidation

The reactions are typically of growth type and occur at atmospheric pressure and high temperatures. The growth rate is dependent on temperature and time.


Processing Technique(s)

Capabilities and Specifications

Cleaning Required: 
Pre-Diffusion Clean
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range: 
400 °C - 1100 °C
Maximum Load: 

Lab Organization, Location, and NEMO Information

NEMO Area: 
SNF: Annealing, Oxidation and Doping
B2T5 Clean Oxide Anneal

Training and Maintenance

Lab Facility: 
Training Charges: 
2.00 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Contact the primary trainer: Neel Mehta
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: Neel Mehta



Operating Instructions