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Tylanfga Forming Gas Anneal Furnace (tylanfga)


The bottom furnace in TylanBank1 is the  TylanFGA Furnace.

SNF staff

Temp shutdown 8/21/23 - 8/23/23, final shutdown by 3/1/24
 Find the current project schedule and more information here.


Processing Technique(s)

Capabilities and Specifications

Cleaning Required: 
Standard Metal Clean
Material Thickness Range: 100.0 Å - 100.0 Å
Process Temperature Range: 
250 °C - 800 °C
Maximum Load: 

For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.

Lab Organization, Location, and NEMO Information

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: Neel Mehta