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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
Safety Training
SDS
Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
Training
Overview/Equipment List
Training Course Online
Upcoming Training, link to NEMO
Training Shadowing Form
Training Videos
All Litho class
Materials
Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
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Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Useful Links
Run NEMO (login required)
NEMO User Guide
External Links
Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
Emergency and People
For Emergencies
Staff List
Consultants
Process Staff Liaisons
Equipment
Equipment Name Table
Characterization
CVD
Doping
Dry Etch
Metallization
Oxidation and Annealing
Photolithography
Wet Chemical Processing
ExFab: 155 Mavericks
Following is a list of tools located in this lab space (room).
Equipment Tables
Summary
Specifications
Items per page
5
10
20
40
50
60
- All -
Equipment name & NEMO ID
Training Required & Charges
Cleanliness
Location
Notes
Biologic SP-300
biologic
Potentiostat BioLogic Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Fisher Accuspin 24C
centrifuge
Centrifuge Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Fujifilm Dimatix Ink Jet Printer
nanoinkjet
Ink Jet Printer Dimatix Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Fumehood 1
fumehood1
Fumehood 1 Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Fumehood 3
fumehood3
Fumehood 3 Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Fumehood 4
fumehood4
Fumehood 4 Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Glovebox-l
glovebox-l
Glovebox-l Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Glovebox-r
glovebox-r
Glovebox-r Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Ika T18 Disperser
disperser
IKA Disperser Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Malvern Dynamic Light Scattering (DLS) Zetasizer
malvern-dls
Malvern Dynamic Light Scattering (DLS) Zetasizer Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Nanocue AFM
AFM NanoCue
AFM NanoCue Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
PDMS Hotplate
hotplate-1
PDMS Hotplate Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
PDMS Spin Coater
spincoat-g3p8
PDMS Spin Coater Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
PDMS Workbench
PDMS Workbench Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater
Parylene Coater Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
QSonica Q700 Sonicator
sonicator
Probe Sonicator Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Thermoscientific Oven
thermoscientific-oven
Thermoscientific Oven Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Thinky AR-100 Mixer
thinky-mixer
Thinky Mixer Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks