Dichlorosilane (H2SiCl2)

DCS
Chemical Formula: 
H2SiCl2
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Partial words okay.
Deposition Equipment
Equipment name & NEMO ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Tystar Bank 2 Tube 7 Nitride
B2T7 Flexible Nitride
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm
Tystar Bank 3 Tube 10 Nitride
B3T10 Clean Nitride
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm