DCS
Chemical Formula:
H2SiCl2
| Equipment name & NEMO ID | Cleanliness | Location | Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
Tystar Bank 2 Tube 7 Nitride B2T7 Flexible Nitride |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 3 Tube 10 Nitride B3T10 Clean Nitride |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|