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Stanford Nanofabrication Facility
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Platinum
Chemical Formula:
Pt
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Fiji 1 ALD
fiji1
Semiclean
SNF Cleanroom Paul G Allen L107
1.00 Å
-
50.00 nm
Metal oxides
Al
2
O
3
HfN
HfO
2
Pt
Ru
SiO
2
Ta
2
O
5
TaN
TiN
TiO
2
Various Dielectrics
ZrO
2
Fiji 2 ALD
fiji2
Flexible
SNF Cleanroom Paul G Allen L107
1.00 Å
-
50.00 nm
Metal oxides
Al
2
O
3
Ga
2
O
3
HfN
HfO
2
In
2
O
3
In
x
Sn
y
O
z
MoO
3
Ni
x
O
y
Pt
Ru
Si3N4
SiO
2
SnO
2
SrO
Ta
2
O
5
TiN
TiO
2
Various Dielectrics
ZrO
2
AJA2 Evaporator
aja2-evap
Semiclean
SNF Cleanroom Paul G Allen L107
0.00
-
300.00 nm
Ag
Al
Co
Cr
Ge
Hf
Mo
Nb
Pd
Pt
Si
Ta
Ti
V
W
Zr
AJA Evaporator
aja-evap
Flexible
SNF Exfab Paul G Allen 155A Venice
0.00
-
300.00 nm
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
Hf
Ni
Ni
x
O
y
Pd
Pt
SiO
2
Ti
TiO
2
Projects
Ultra-smooth platinum films for biosensing applications- Final Report
-- (Report)
Preparation of Ultra-Smooth Platinum Films- Final Presentation
-- (Presentation)