| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Resist Develop (automatic) |
SVG Develop Track 1 svgdev |
Automatic resist development of 4" wafers in cassette holding up to 25 wafers. |
"All" | SNF Paul G Allen L107 Cleanroom |
| Resist Develop (automatic) |
SVG Develop Track 2 svgdev2 |
Automatic resist development of 4" wafers in cassette holding up to 25 wafers. |
"All" | SNF Paul G Allen L107 Cleanroom |
Stanford Nanofabrication Facility
Lab User Guide