Sputtering is a physical vapor deposition method of thin film deposition. This involves ejecting material from a "target" that is a source onto a "substrate".
| Processing Techniques | Equipment name & NEMO ID | Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Sputtering |
Hummer V Sputter Coater hummer |
Flexible | SNF Exfab Paul G Allen 104 Stinson | |
| Sputtering |
Lesker Sputter lesker-sputter |
Flexible | SNF Exfab Paul G Allen 155A Venice | |
| Sputtering |
Lesker2 Sputter lesker2-sputter |
Semiclean | SNF Paul G Allen L107 Cleanroom |