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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
Safety Training
SDS
Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
Training
Overview/Equipment List
Training Course Online
Upcoming Training, link to NEMO
Training Shadowing Form
Training Videos
All Litho class
Materials
Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
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Other Chemicals
Primer
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Solvents
Substrate Types and Sizes
Materials List
Gases List
Useful Links
Run NEMO (login required)
NEMO User Guide
External Links
Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
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For Emergencies
Staff List
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Process Staff Liaisons
Equipment
Equipment Name Table
Characterization
CVD
Doping
Dry Etch
Metallization
Oxidation and Annealing
Photolithography
Wet Chemical Processing
Equipment Used
Heidelberg MLA 150 (heidelberg)
Heidelberg MLA 150 - 2 (heidelberg2)
Heidelberg Training Videos
Training video playlist for Heidelberg
