Introduction of EBR PG Wash Bottle for litho solvent bench

PROM Request Title:

Introduction of EBR PG Wash Bottle for litho solvent bench

PROM Request Summary:

Documenting new chemistry that will be stocked by SNF.

PROM Date:

08/20/2019 (all day)

PROM Decision:

Approved.

Link to PROM Request and supporting documentation:

Introduction of EBR PG Wash Bottle for litho solvent bench

Equipment List:

Laurell Manual Resist Spinner (laurell-R)

Wet Bench Solvent Lithography (lithosolv)

Headway Manual Resist Spinner (headway2)