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Etching of contaminated wafer pieces in Lampoly

PROM Request Title: 
Etching of contaminated wafer pieces in Lampoly
PROM Request Summary: 
Request to use Lampoly to etch straight profiles into contaminated wafer pieces.
PROM Date: 
09/30/2015
PROM Decision: 
Request approved with ICPMS contamination collection.
Link to PROM Request and supporting documentation: 
Etching of contaminated wafer pieces in Lampoly
Equipment List: 
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Lam Research TCP 9400 Poly Etcher (lampoly)