Smooth Sidewall Etching in PT-DSE
Project Type:
E241
Date:
December 2014
Areas of Interest:
High aspect ratio etches with smooth sidewalls, 'Bosch' process recipes
Processing Technique (former Function and Method):
Researchers and (Mentors):
Andrew Ceballos, Stephen Hamann, (Usha Raghuram)
List of Important Equipment:
