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MOCVD Regrown Ohmic Contacts to AlGaN/GaN Heterostructures

Project Type: 
E241
Date: 
June 2018
Areas of Interest: 
MOCVD regrowth, patterned in cleanroom and then return to MOCVD tools
Researchers and (Mentors): 
Savannah Bennbrook, Yanni Dahmani, (Xiaoqing Xu)