Skip to content Skip to navigation

Improve the performance of MOCVD grown GaN-on-Si HEMT structure

Project Type: 
Community Service
Date: 
September 2015
Report(s): 
Improve the performance of MOCVD grown GaN-on-Si HEMT structure
Processing Technique (former Function and Method): 
Metal-Organic (MO) CVD
List of Important Equipment: 
Aixtron MOCVD - III-N system (aix-ccs)