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Fabrication of cylindrical antifuse for cost-efficient 3D ICs

Project Type: 
E241
Date: 
June 2025 (all day)
Areas of Interest: 
Etching, ALD
Report: 
Fabrication of cylindrical antifuse for cost-efficient 3D ICs - Final Report
Researchers and (Mentors): 
Louis Le Coeur, Andrew Bechdolt (Swaroop Kommera, Don Gardner)
List of Important Equipment: 
Fiji 2 ALD (fiji2)
Materials
Aluminum Oxide
Titanium NItride
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