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Fabrication and Characterization of High Kinetic Inductance Superconducting Resonators via Atomic Layer Etching

Project Type: 
E241
Date: 
June 2025 (all day)
Areas of Interest: 
Etching
Report: 
Fabrication and Characterization of High Kinetic Inductance Superconducting Resonators via Atomic Layer Etching - Final Report
Researchers and (Mentors): 
Yueheng Shi, Kaushal Shyamsundar (Lavendra Mandyam, Michelle Rincon, Ke Huang)
List of Important Equipment: 
Oxford Plasma Pro ICP-RIE ALE (Ox-ALE)
Materials
Niobium Nitride
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