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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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SNF Lab Manual, link to google doc
SNF Lab Manual
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Gowning Procedure for Cleanroom L107
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All Litho class
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"All" List of Tools
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Run NEMO (login required)
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Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
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Characterization
CVD
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Photolithography
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Materials
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Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
Developers
Metal Etchants
Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Niobium Nitride
Chemical Formula:
NbN
Projects
Fabrication and Characterization of High Kinetic Inductance Superconducting Resonators via Atomic Layer Etching
