Project Type: 
E241
Date: 
June 2018 (all day)
Areas of Interest: 
Process development of InSb etch
Report: 
Dry Etching of InSb Using OX-35 Etcher- Final Report
Processing Technique (former Function and Method): 
Dry Etching
Researchers and (Mentors): 
Settasit Chaikasetsin, Matthew Gutwald, Kate Lee, (Usha Raghuram), (Jim McVittie)
List of Important Equipment: 
Oxford III-V etcher (Ox-35)
Nano Nugget: 
Presentation: 
Dry Etching of InSb Using OX-35 Etcher- Final Presentation