Addressing Grassing and Overetch in SiO2 Hardmask
Line Edge Roughness seen in AFM and SEM imaging
Troubleshooting tips for roughened surfaces after etch (also called grassing or line edge roughness).
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Thursday, August 10, 2023
Line Edge Roughness seen in AFM and SEM imaging
Troubleshooting tips for roughened surfaces after etch (also called grassing or line edge roughness).
