Project Type: 
E241
Date: 
June 2022 (all day)
Areas of Interest: 
Deposition
Researchers and (Mentors): 
Shuhan Liu, Xinyi Wen, Nathalie Moreno (Vijay Narasimhan, Graham J. Ewing, Michelle Rincon, Angelica Zacatzi, H.-S. Philip Wong)
Notes: 

ALD ITO

PDF File: E241 ALD ITO_report_v2.pdf