SiNx PECVD and Nanostructure Etching Recipe Development- Final Report PDF File: SiNx PECVD and Nanostructure Etching Recipe Development- Final Report This should be displaying <a href="https://snfguide.stanford.edu/files/sections/diplayfiles/ee412_final_report_yusi_and_muyu.pdf">SiNx PECVD and Nanostructure Etching Recipe Development- Final Report</a> inline. If it's not, look to see if your browser is set to automatically download pdf files. Materials Silicon Nitride
