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Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation

Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation

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Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation

Materials

Aluminum Nitride (AlN)

Gallium Nitride (GaN)

Aluminum Gallium Nitride (AlGaN)

Thursday, August 10, 2023