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Equipment Used:
Tystar Bank 1 Tube 3 Poly (B1T3 Flexible Poly)
Tystar Bank 3 Tube 10 Nitride (B3T10 Clean Nitride)
Tystar Bank 1 Tube 4 LTO (B1T4 Flexible LTO)
Tystar Bank 2 Tube 8 LTO (B2T8 Clean LTO)
Tystar Bank 3 Tube 11 TEOS (B3T11 Clean TEOS)
Tystar Bank 3 Tube 12 Poly (B3T12 Clean Poly)
Tystar LPCVD Tube SOP
Source:
Tystar LPCVD Tube SOP
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