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Stanford Nanofabrication Facility
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Wafer Polishing
Wafer polishing is used to planarize patterned surfaces and to smooth surface roughness.
Technique Tabs
Main Tab
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Processing Techniques
Equipment name & NEMO ID
Teaser Blurb
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Location
Wafer Polishing
CMP GnP POLI-400L
cmp
Flexible
SNF Exfab Paul G Allen 159 Capitola
Detail Tab
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10
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40
50
60
- All -
Processing Technique
Equipment name & NEMO ID
Cleanliness
Wafer Polishing
CMP GnP POLI-400L
cmp
Flexible
