PROM Request Title: 
Process flow to go from PT-DSE (contaminated) to epi2 (clean)
PROM Request Summary: 
Process flow change request to go from contaminated to clean equipment (in violation of contmaination policy).
PROM Date: 
01/21/2014 (all day)
PROM Decision: 
Rejected. Further follow up from requester required.
Link to PROM Request and supporting documentation: 
Process flow to go from PT-DSE (contaminated) to epi2 (clean)
Equipment List: 
AMAT Centurion Epitaxial System (epi2)