PROM Request Title:
Etching FOx-22 in PT-MTL
PROM Request Summary:
Request to etch FOx-22 spin on glass in PT-MTL etcher.
PROM Date:
07/25/2014 (all day)
PROM Decision:
Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL.
Link to PROM Request and supporting documentation:
Equipment List: