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Etching Y on MoS2 substrate at wbflexcorr

PROM Request Title: 
Etching Y on MoS2 substrate at wbflexcorr
PROM Request Summary: 
Request to etch Y at wbflexcorr.
PROM Date: 
10/07/2014
PROM Decision: 
Approved for documented quantities. Re-approval required if quantities change.