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CCP PECVD on FOx-22 SOG

PROM Request Title: 
CCP PECVD on FOx-22 SOG
PROM Request Summary: 
Request to deposit dielectric material using CCP PECVD on FOx-22 SOG.
PROM Date: 
10/10/2014 (all day)
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
CCP PECVD on FOx-22 SOG
Equipment List: 
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
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