CCP PECVD on FOx-22 SOG
PROM Request Title:
CCP PECVD on FOx-22 SOG
PROM Request Summary:
Request to deposit dielectric material using CCP PECVD on FOx-22 SOG.
PROM Date:
10/10/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
