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Sub-micron metal patterning on polymer substrates using nitride nanostencil

Project Type: 
E241
Date: 
June 2021
Areas of Interest: 
Nano stencil, polymer and metal integration
Report(s): 
Sub-micron metal patterning on polymer substrates using nitride nanostencil
Processing Technique (former Function and Method): 
Patterning
Researchers and (Mentors): 
Anqi Ji, Skyler Selvin, (Graham Ewing), (Swaroop Kommera), (Tony Ricco), (Mark Zdeblick)
List of Important Equipment: 
AJA Evaporator (aja-evap)
Heidelberg MLA 150 (heidelberg)
PDMS Workbench ()
Nano Nugget(s): 

SOP- Gold-PDMS adhesion enhancement

Adhesion between metals and polymers are rarely explored. For each type of polymer and metal combination, a customized adhesion method needs to be established- here is a case study for PDMS and Gold adhesion.

SOP- Sub-micron metal patterning on polymer substrates using nitride nanostencil

A process flow of resist-free nanostencil lithography technique that allows sub-micron metal patterningon a polymer substrate is established.