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Multilevel Silicon Structure and Fabricated Pushing Mold for Sample Transfer

Project Type: 
E241
Date: 
June 2025 (all day)
Areas of Interest: 
Spray Coating, Etching
Report: 
Multilevel Silicon Structure and Fabricated Pushing Mold for Sample Transfer - Final Report
Researchers and (Mentors): 
Rosa Son, Ruixin Qiu (Lavendra Mandyam, Mark Zdeblick)
List of Important Equipment: 
EVG 101 Spray Coater (evgspraycoat)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
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