Enabling Pattern Transfer for Block Copolymer Directed Self-Assembly

Project Type:

E241

Date:

June 2018 (all day)

Areas of Interest:

Nanoscale patterning, DSA

Report:

Processing Technique (former Function and Method):

Patterning

Researchers and (Mentors):

Maryanne Tung, (Michelle Rincon)

List of Important Equipment:

Nano Nugget:

Basics of Block Copolymer Directed Self Assembly

Block copolymer Directed Self Assembly (DSA) is a technique used to create high resolution structures without advanced lithography techniques.

Presentation: