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Enabling Pattern Transfer for Block Copolymer Directed Self-Assembly

Project Type: 
June 2018
Areas of Interest: 
Nanoscale patterning, DSA
Processing Technique (former Function and Method): 
Researchers and (Mentors): 
Maryanne Tung, (Michelle Rincon)
Nano Nugget(s): 

Block copolymer Directed Self Assembly (DSA) is a technique used to create high resolution structures without advanced lithography techniques.