Bulk Silicon Carbide etching in PT-MTL

Project Type:

E241

Date:

June 2014 (all day)

Areas of Interest:

SiC etching in PT-MTL

Report:

Bulk Silicon Carbide Etching in PT-MTL- Final Report

Processing Technique (former Function and Method):

Dry Etching

Researchers and (Mentors):

Karen Dowling and Ashwin Shankar

List of Important Equipment:

Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)