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Stanford Nanofabrication Facility
Lab User Guide

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  • Guide Home
    • Guide Home Overview
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    • How to Join
    • Contacts and Emergency
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  • Techniques
    • Overview
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    • Projects
      • Fab Project Courses: E241 & EE412
      • Community Service Projects
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    • Nano Nuggets
    • Processes
      • Device Process Courses: EE410 and EE312
    • Runsheets
  • Safety & Policies
    • Overview
    • SNF Lab Manual, link to google doc
    • SNF Lab Manual
      • SNF Lab Manual
    • Safety Training
    • SDS
    • Gowning lab specific
    • Garment checkout for Cleanroom L107
    • Gowning Procedure for Cleanroom L107
    • Mavericks (ExFab Room 155) Policies
    • Prescription Safety Glasses
  • Training
    • Overview/Equipment List
    • Training Course Online
    • Upcoming Training, link to NEMO
    • Training Shadowing Form
    • Training Videos
    • All Litho class
  • Materials
    • Overview
      • Chemicals & Materials
    • Cleanliness Groups
      • "All" List of Tools
      • "Clean" List of Tools
        • "Clean-Ge" List of Tools
        • "Clean (MOCVD)" List of Tools
        • "Semiclean" List of Tools
      • "Flexible" List of Tools
    • New Process or Material Requests (PROM)
      • ProM Committee
      • ProM Approach
      • TMAH Protocols
        • TMAH Checklist
      • PROM (PRocess and Materials) Form
      • PROM archive view
    • Chemicals List
      • Acids
      • Bases
      • Developers
      • Metal Etchants
      • Other Chemicals
      • Primer
      • Resists
      • Solvents
    • Substrate Types and Sizes
    • Materials List
    • Gases List
  • Useful Links
    • Run NEMO (login required)
    • NEMO User Guide
    • External Links
    • Wafer Dopant and Resistivity Specs
    • Face shield cleaning using steamer
    • Tool Monitoring
  • Emergency and People
    • For Emergencies
    • Staff List
    • Consultants
    • Process Staff Liaisons
  • Equipment
    • Equipment Name Table
    • Characterization (link to Processing Techniques)
    • CVD (link to Processing Techniques)
      • MOCVD Equipment
      • ALD Equipment
      • PECVD Equipment
      • LPCVD Equipment
    • Doping (link to Processing Techniques)
    • Dry Etch (link to Processing Techniques)
      • RIE Etchers
      • Vapor Etchers
      • CCP Etchers
      • Downstream Plasma Etchers
      • ICP Etchers
      • Legacy Dry Etch Equipment Overview
    • Metallization (link to Processing Techniques)
    • Oxidation and Annealing (link to Processing Techniques)
    • Photolithography (link to Processing Techniques)
      • Lithography Oven Equipment
      • Resist Coat Equipment
      • Resist Develop Equipment
      • Resist Exposure Equipment
    • Wet Chemical Processing (link to Processing Techniques)

Emergency and People

  • For Emergencies
  • Staff List
  • Consultants
  • Process Staff Liaisons

Mary Tang

Contact Information

Phone: 
(650)723-9980
Office location (building & room #): 
Paul G. Allen 141
Email: 
mtang@stanford.edu

About

Title: 
SNF Managing Director
Liaison Specialties: 
Biological/chemical analysis
MEMS
Microfluidics
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