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Stanford Nanofabrication Facility
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Characterization (link to Processing Techniques)
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RIE Etchers
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Legacy Dry Etch Equipment Overview
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Lithography Oven Equipment
Resist Coat Equipment
Resist Develop Equipment
Resist Exposure Equipment
Wet Chemical Processing (link to Processing Techniques)
Materials
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Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
Developers
Metal Etchants
Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Silicon Germanium
Silicon Germanium (SiGe)
Chemical Formula:
SiGe
Etch Equipment Table
Anneal/Oxidation Equipment Table
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