CO2 drying is an efficient method of drying delicate samples without damaging their structure by surface tension that occurs when changing from the liquid to the gaseous phase.
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Chemicals | Substrate Size | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|
| CO2 Drying, Wet Chemical Processing |
Critical Point Dryer Tousimis Automegasamdri-936 cpd |
Flexible |
CO2 drying after release of micromachined devices |