| Processing Technique | Equipment name & NEMO ID | Cleanliness | Material Thickness Range | Substrate Size | Maximum Load (number of wafers) | Process Temperature Range | Stylus Tip Radius |
|---|---|---|---|---|---|---|---|
| Sheet Resistance Measurement, Hall measurement |
Lakeshore Hall Measurement System LakeshoreHall |
"All" |
100.00 μm -
1000.00 μm
|
1 piece |
-258 °C - 1000 °C
|