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Lab User Guide

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    • Equipment Name Table
    • Characterization (link to Processing Techniques)
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      • Legacy Dry Etch Equipment Overview
    • Metallization (link to Processing Techniques)
    • Oxidation and Annealing (link to Processing Techniques)
    • Photolithography (link to Processing Techniques)
      • Lithography Oven Equipment
      • Resist Coat Equipment
      • Resist Develop Equipment
      • Resist Exposure Equipment
    • Wet Chemical Processing (link to Processing Techniques)

Equipment Used

HMDS Vapor Prime Oven, YES (yes)

YES Prime Oven

Source: 
YES Prime Oven
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