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Stanford Nanofabrication Facility
Lab User Guide

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      • Fab Project Courses: E241 & EE412
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    • Overview
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    • Cleanliness Groups
      • "All" List of Tools
      • "Clean" List of Tools
        • "Clean-Ge" List of Tools
        • "Clean (MOCVD)" List of Tools
        • "Semiclean" List of Tools
      • "Flexible" List of Tools
    • New Process or Material Requests (PROM)
      • ProM Committee
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        • TMAH Checklist
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      • Primer
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    • Substrate Types and Sizes
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  • Useful Links
    • Run NEMO (login required)
    • NEMO User Guide
    • External Links
    • Wafer Dopant and Resistivity Specs
    • Face shield cleaning using steamer
    • Tool Monitoring
  • Emergency and People
    • For Emergencies
    • Staff List
    • Consultants
    • Process Staff Liaisons
  • Equipment
    • Equipment Name Table
    • Characterization (link to Processing Techniques)
    • CVD (link to Processing Techniques)
      • MOCVD Equipment
      • ALD Equipment
      • PECVD Equipment
      • LPCVD Equipment
    • Doping (link to Processing Techniques)
    • Dry Etch (link to Processing Techniques)
      • RIE Etchers
      • Vapor Etchers
      • CCP Etchers
      • Downstream Plasma Etchers
      • ICP Etchers
      • Legacy Dry Etch Equipment Overview
    • Metallization (link to Processing Techniques)
    • Oxidation and Annealing (link to Processing Techniques)
    • Photolithography (link to Processing Techniques)
      • Lithography Oven Equipment
      • Resist Coat Equipment
      • Resist Develop Equipment
      • Resist Exposure Equipment
    • Wet Chemical Processing (link to Processing Techniques)

Equipment Used

PlasmaTherm Shuttlelock PECVD System (ccp-dep)

PlasmaTherm PECVD CCP Dep Operating Instructions

Source: 
PlasmaTherm PECVD CCPDEP Operating Instructions
Trouble with permissions to access the document below? Email the SNF Web Crew with the URL of this page & the document name!

PlasmaTherm PECVD CCPDEP Operating Instructions

Source: 
PlasmaTherm PECVD CCPDEP Tips
Trouble with permissions to access the document below? Email the SNF Web Crew with the URL of this page & the document name!
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