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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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SNF Lab Manual, link to google doc
SNF Lab Manual
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Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
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All Litho class
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"All" List of Tools
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Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
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Characterization
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Equipment Used
Lam Research TCP 9400 Poly Etcher (lampoly)
Lampoly Video Recipe Setup
SNF Lampoly Recipe Editing
Video describing Lampoly recipe set up: creation and editing.
