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Function and Method(s):
Bonding
Related Documentation
Project
Plasma activated direct bonding of silicon and lithium niobate thin films
Plasma activated direct bonding of silicon and lithium niobate thin films
Direct Bonding Chips with Tweezers
Direct Bonding Chips with Tweezers
PDF File:
Direct Bonding Chips with Tweezers
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Materials
Lithium Niobate (LiNb)
Silicon (Si)
Thursday, August 10, 2023
