Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
Intlvac Evaporator Intlvac_evap |
Evaporator Intlvac Training | Clean, Semiclean | SNF Cleanroom Paul G Allen L107 |
Equipment name & NEMO ID | Technique | Cleanliness | Material Thickness Range | Materials Lab Supplied | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|
Intlvac Evaporator Intlvac_evap |
Clean, Semiclean |
0.00 -
0.50 μm
|
, , |
12 4 inch wafers, 2 6 inch wafers |